氮化硅材料提供了一种与CMOS兼容的集成光子平台，具有丰富的光学特性。通过调节相关制备参数，可以获得特定折射率的薄膜材料，且消光系数和非线性系数具有较大可调控范围。因此，氮化硅材料在薄膜光学、微纳平面光学、非线性集成光学等诸多领域具有广泛的应用前景。本文主要介绍氮化硅材料的光学特性及其在光学薄膜、微纳超构材料和硅光集成器件方面的研究现状，综述氮化硅材料在太阳能薄膜、可见光超构表面、光栅耦合器和非线性光波导等应用领域的研究概况。

Microendoscopes are vital for disease detection and clinical diagnosis. The essential issue for microendoscopes is to achieve minimally invasive and high-resolution observations of soft tissue structures inside deep body cavities. Obviously, the microscope objective is a must with the capabilities of both high lateral resolution in a wide field of view (FOV) and miniaturization in size. Here, we propose a meta-objective, i.e., microscope objective based on cascaded metalenses. The two metalenses, with the optical diameters of 400 μm and 180 μm, respectively, are mounted on both sides of a 500-μm-thick silica film. Sub-micrometer lateral resolution reaches as high as 775 nm in such a naked meta-objective, with monochromatic aberration correction in a 125 μm full FOV and near diffraction limit imaging. Combined with a fiber bundle microscope system, the single cell contour of biological tissue (e.g., water lily leaf) can be clearly observed, compared to the indistinguishable features in other conventional lens-based fiber bundle systems, such as plano–convex and gradient refractive index (GRIN) cases.